Keyword Analysis & Research: thornton structural zone model

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What are the parameters of the structure-zone model?

Structure-Zone Model works for several deposition techniques, like PVD and CVD, and for various materials (metals, isolators, semiconductors) Important parameters: • Normalized temperature Ts/Tm • Energy transfer, atoms at high energy A.Yurgens 2004-12-04 2 Ohring, Fig 9-2 Structural zones as a result of different physical processes

What are integrated models of structural zones of Ti-Al-N-based and Tin films?

Integrated models of structural zones of the Ti-Al-N-based and TiN films formed by the arc method are constructed for the qualitative description and prediction of the structural evolution of the film depending on the process and temperature parameters of the preparation and deposition.

What is the Thornton model of sputtering?

Originally, the Thornton model was developed to describe the growth of sputtered metals in dependence of two parameters, substrate temperature and sputter pressure [10,11]. In literature, this model is very often applied to describe the growth of sputtered films from different materials (e.g. [12,13]).

What is Thornton SZM?

Thornton ׳ SZM developed to produ ce single-layer thick films by the magnetron sputtering, hold for [18]. There are various examples for the structure monitori ng of films based on oxides, nitrides and fluorides of solid and gaseous elements, obtain ed by a number of vacuum methods, using Thornton ׳ SZM [11].

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