Introduction to MEMS (Microelectromechanical Systems)
https://www.allaboutcircuits.com/technical-articles/introduction-to-mems-microelectromechanical-systems/
WebDec 4, 2018 · As explained in a paper on MEMS published by Loughborough University in England, MEMS devices make use of micromachined structures, sensors, and actuators. Sensors allow a MEMS to detect thermal, mechanical, magnetic, electromagnetic, or chemical changes that can be converted by electronic circuitry into usable data, and …
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